Ken Cadien, PhD


Faculty of Engineering - Chemical and Materials Engineering Dept


Area of Study / Keywords

Professor Emeritus Nanomaterials and Nanofabrication Surface Science and Engineering


Dr. Cadien has B.Eng. and M. Eng. degrees from McGill University, and a PhD from the University of Illinois at Champaign-Urbana, all in Metallurgy and Materials Science. At McGill he worked with John Jonas on the high temperature plastic flow of copper, and at Illinois he did his PhD with Joe Greene on metastable compound semiconductor thin films. After stints at Kodak (CCD imagers) and academia (Duke and RPI), he joined Intel in 1990 as a thin films group leader, and started working in chemical mechanical polish in 1992 on tungsten polish. He was appointed an Intel Fellow in 1998 for his many innovations in semiconductor fabrication. From 1998 to 2006 he was Director of Innovative Technology, managing many exploratory projects in diverse technology areas from optical interconnects, electropolish, and 3D interconnects with through silicon via technology. He retired from Intel in December 2006 and joined the faculty of the University of Alberta in January 2007. He was appointed an IEEE Fellow in January 2008 for his semiconductor contributions, and in January, 2012 he was named a Fellow of the National Institute of Nanotechnology. Dr. Cadien also works closely with several start-up companies in Alberta and Vancouver, and he was a member of the Board of Directors of ACAMP.  

Dr. Cadien is an expert in atomic layer deposition and nanofabrication and he applies these techniques to high efficiency gallium nitride inverters for solar and hybrid cars, and zinc oxide thin film transistors for flexible electronics. Ken has authored 36 patents and over >74 publications, plus several book chapters and has made many invited talks.


Dr. Cadien does nanofabrication research in energy related fields such as solar cells and conversion of carbon compounds to alternate high value products. He also works with Dr. Doug Barlage in ECE to develop GaN MOSFET devices for high power applications and ZnO devices for display technology.  

Keywords: Nanofabrication, ALD, CMP, ZnO and GaN devices, products from asphaltenes/cellulose