Steven Dew, PhD, MASc, BASc, PEng

Area of Study / Keywords

engineering nanotechnology nanofabrication microelectronic process technology process simulation thin film technology electron beam lithography

About

I received my BASc and MASc in Engineering Physics at UBC and PhD in Electrical Engineering at the University of Alberta. I joined the Department of Electrical and Computer Engineering in 1992 and am currently Professor there. I served as Associate Dean (Research & Planning) for the Faculty of Engineering from 1999-2015 and then Provost and Vice-President (Academic) for the University of Alberta from 2015-2022. I am currently on administrative leave (sabbatical) rebuilding research activities and examining institutional academic performance assessment methods.

Research

My research interests lie in the general field of nanofabrication and thin film process technology. This work is primarily conducted at the University of Alberta nanoFAB and with the NRC Nanotechnology Research Centre (formerly NINT) which collectively have truly world class facilities for many of the relevant processes and characterization. This involves studying the processes used to form and pattern at the nano- and near nanometre scale the structures used in microelectronics, sensors and other nanosystems. Key contributions have been in integrated circuit metallization systems, thin film process simulation, sputter deposition, electron beam lithography, and functionalization of surfaces and particles with biomolecules.

Teaching

I have taught undergraduate courses in control systems, digital systems, microfabrication, and electrical circuit theory. At the graduate level, I have taught microelectronics process technology and micro- and nanofabrication.