There are currently no scheduled offerings of this course. For more information on when this course may be offered in the future please contact the Registrar's Office.
ECE 658 - Microsensors and Microelectromechanical Systems
Overview of Micromachining Technologies, Lumped Modeling and Energy Conserving Transducers, Review of Elasticity and Micromechanical Structures, Case Study : Piezoelectric Pressure Sensors, Case Study : Capacitive Accelerometers, Overview of Microfluidics, Case Study : PCR-on-a-chip systems.