ECE 658 - Microsensors and Microelectromechanical Systems

★ 3 (fi 6)(EITHER, 3-0-0)

Faculty of Engineering

Overview of Micromachining Technologies, Lumped Modeling and Energy Conserving Transducers, Review of Elasticity and Micromechanical Structures, Case Study : Piezoelectric Pressure Sensors, Case Study : Capacitive Accelerometers, Overview of Microfluidics, Case Study : PCR-on-a-chip systems.