There are currently no scheduled offerings of this course. For more information on when this course may be offered in the future please contact the Registrar's Office.
MEC E 664 - Advanced Design and Simulation of Micro and Nano Electromechanical Sensors (MEMS/NEMS)
Advanced topics dealing with MEMS technologies, transduction mechanisms, and microfabricated sensors and actuators. Sensors for acceleration, rotation rate, pressure, and different micro actuators. MEMS in microfluidics and biomedical applications. Chemical, gas, and biosensors. Prerequisite: MEC E 563 and consent of Instructor. Not open to students with credit in MEC E 564.