MEC E 664 - Advanced Design and Simulation of Micro and Nano Electromechanical Sensors (MEMS/NEMS)

★ 3 (fi 6)(EITHER, 3-0-0)

Faculty of Engineering

Advanced topics dealing with MEMS technologies, transduction mechanisms, and microfabricated sensors and actuators. Sensors for acceleration, rotation rate, pressure, and different micro actuators. MEMS in microfluidics and biomedical applications. Chemical, gas, and biosensors. Prerequisite: MEC E 563 and consent of Instructor. Not open to students with credit in MEC E 564.