Microfabrication processes for CMOS, bipolar, MEMS, and microfluidics devices. Laboratory safety. Deposition processes of oxidation, evaporation and sputtering. Lithography, wet and dry etch, and device characterization. Note: Consent of Department required. Credit may be obtained in only one of ECE 457 or E E 457.
| Section | Capacity | Class times | Instructor(s) |
|---|---|---|---|
|
LECTURE B1
(10579) |
20 |
2024-01-08 - 2024-04-12 (MWF)
09:00 - 09:50
NRE 2-016
|
Primary Instructor: Jeremy Sit
|
| Section | Capacity | Class times | Instructor(s) |
|---|---|---|---|
|
LAB H11
(19417) |
4 |
2024-01-08 - 2024-04-12 (M)
14:00 - 15:50
ECERF W1-060
|
|
|
LAB H21
(19049) |
4 |
2024-01-08 - 2024-04-12 (T)
14:00 - 15:50
ECERF W1-060
|
|
|
LAB H31
(12449) |
4 |
2024-01-08 - 2024-04-12 (W)
14:00 - 15:50
ECERF W1-060
|
|
|
LAB H41
(12450) |
4 |
2024-01-08 - 2024-04-12 (R)
14:00 - 15:50
ECERF W1-060
|
|
|
LAB H51
(19050) |
4 |
2024-01-08 - 2024-04-12 (F)
14:00 - 15:50
ECERF W1-060
|
|