ECE 458 - Introduction to Microelectromechanical Systems

★ 3 (fi 8)(EITHER, 3-0-0)

Faculty of Engineering

Overview of microelectromechanical (MEMS) systems, applications of MEMS technology to radio frequency, optical and biomedical devices. Basic MEMS building blocks, cantilever and clamped-clamped beams. Actuation mechanisms of mechanical microdevices, thermal and electrostatic. The thin film fabrication process, deposition, lithography, etching and release. MEMS in circuits, switches, capacitors, and resonators. Prerequisites: ECE 370 or E E 315 or PHYS 381, and one of MAT E 201, PHYS 244, MEC E 250. Credit may be obtained in only one of ECE 458 or E E 458.

No syllabi

Fall Term 2023

Lectures

Section Capacity Class times Instructor(s)
LECTURE A1
(85622)
25
2023-09-05 - 2023-12-08 (MWF)
11:00 - 11:50
NRE 2-020

Final Exam:
2023-12-13
14:00 - 17:00
NRE 2-020
Primary Instructor: Karthik Shankar