ECE 458 - Introduction to Microelectromechanical Systems

★ 3 (fi 8)(EITHER, 3-0-0)

Faculty of Engineering

Overview of microelectromechanical (MEMS) systems, applications of MEMS technology to radio frequency, optical and biomedical devices. Basic MEMS building blocks, cantilever and clamped-clamped beams. Actuation mechanisms of mechanical microdevices, thermal and electrostatic. The thin film fabrication process, deposition, lithography, etching and release. MEMS in circuits, switches, capacitors, and resonators. Prerequisites: ECE 370 or E E 315 or PHYS 381, and one of MAT E 201, PHYS 244, MEC E 250. Credit may be obtained in only one of ECE 458 or E E 458.