There are currently no scheduled offerings of this course. For more information on when this course may be offered in the future please contact the Registrar's Office.
ECE 559 - Microfabrication and Nanofabrication Topics II
The fabrication process for microelectronics and MEMs applications. Overview of processing steps: silicon wafer material, oxidation, lithography, diffusion, etching and ion implantation, chemical and physical vapor deposition, metallization. Process model. Yield, packaging, and assembly.