ECE 559 - Microfabrication and Nanofabrication Topics II

★ 3 (fi 6)(EITHER, 3-0-0)

Faculty of Engineering

The fabrication process for microelectronics and MEMs applications. Overview of processing steps: silicon wafer material, oxidation, lithography, diffusion, etching and ion implantation, chemical and physical vapor deposition, metallization. Process model. Yield, packaging, and assembly.

Winter Term 2022

Lectures

LECTURE B1 (77059)
Capacity: 30
2022-01-05 - 2022-04-08
TH 11:00 - 12:20 (ED 327)

Primary Instructor: Xihua Wang