ECE 455 - Engineering of Nanobiotechnological Systems

★ 3 (fi 8)(EITHER, 3-0-0)

Microfluidic and nanobiotechnological devices. Fabrication techniques for devices: self-assembly, lithographic technologies. Applications of nanobiotechnology in computing, electronics, human health, environment and manufacture. Prerequisites: MATH 201 or PHYS 230. Credit may be obtained in only one of ECE 455 or E E 455.

ECE 559 - Microfabrication and Nanofabrication Topics II

★ 3 (fi 6)(EITHER, 3-0-0)

The fabrication process for microelectronics and MEMs applications. Overview of processing steps: silicon wafer material, oxidation, lithography, diffusion, etching and ion implantation, chemical and physical vapor deposition, metallization. Process model. Yield, packaging, and assembly.