ECE 559 - Microfabrication and Nanofabrication Topics II

3 units (fi 6)(EITHER, 3-0-0)

The fabrication process for microelectronics and MEMs applications. Overview of processing steps: silicon wafer material, oxidation, lithography, diffusion, etching and ion implantation, chemical and physical vapor deposition, metallization. Process model. Yield, packaging, and assembly.